Dr. Peter A. Rosenthal
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 2 June 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: FT-IR spectroscopy, Metrology, Etching, Silicon, Reflectivity, Nondestructive evaluation, Scanning electron microscopy, Infrared radiation, Transistors, Semiconducting wafers

Proceedings Article | 11 October 2000
Proc. SPIE. 4103, Optical Diagnostic Methods for Inorganic Materials II
KEYWORDS: Oxides, FT-IR spectroscopy, Scattering, Interfaces, Silicon, Light scattering, Reflectivity, Oxygen, Scatterometry, Semiconducting wafers

Proceedings Article | 8 October 1998
Proc. SPIE. 3425, Optical Diagnostic Methods for Inorganic Transmissive Materials
KEYWORDS: Oxides, FT-IR spectroscopy, Reflection, Sensors, Spectroscopy, Silicon, Reflectivity, Oxygen, Process control, Semiconducting wafers

Proceedings Article | 27 August 1998
Proc. SPIE. 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II
KEYWORDS: Semiconductors, FT-IR spectroscopy, Metrology, Sensors, Spectroscopy, Spectrometers, Dielectrics, Doping, Process control, Reflectance spectroscopy

Proceedings Article | 19 January 1995
Proc. SPIE. 2367, Optical Sensors for Environmental and Chemical Process Monitoring
KEYWORDS: Scattering, Sensors, Metals, Particles, Laser scattering, Reflectivity, Infrared radiation, Atmospheric particles, Temperature metrology, Absorption

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