Dr. Peter Trefonas
Fellow at
SPIE Involvement:
Fellow status | Senior status | Author
Publications (34)

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Electron beam lithography, Refractive index, Polymers, Photoresist materials, Polymerization, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Semiconducting wafers, Polymer thin films

PROCEEDINGS ARTICLE | March 25, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, Cadmium, Materials processing, Scanning electron microscopy, Printing, Photoresist materials, Line width roughness, Double patterning technology, Critical dimension metrology, Semiconducting wafers, Photoresist developing, 193nm lithography

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Oxides, Electron beam lithography, Optical lithography, Nanoparticles, Metals, Particles, Materials processing, Scanning electron microscopy, Transmission electron microscopy, Photoresist materials, Extreme ultraviolet lithography, Hafnium, Zirconium, Photoresist developing

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical lithography, Cadmium, Etching, Polymers, Glasses, Silicon, Scanning electron microscopy, Line width roughness, Directed self assembly, Reactive ion etching

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Etching, Dry etching, Polymers, Metals, Silicon, Reflectivity, Chemical vapor deposition, Oxygen, Photoresist materials, Photomasks

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Cadmium, Etching, Dry etching, Polymers, Silicon, Scanning electron microscopy, Line width roughness, Directed self assembly, Line edge roughness, Semiconducting wafers

Showing 5 of 34 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top