Dr. Peter Trefonas
Fellow at DuPont Electronics & Industrial
SPIE Involvement:
Publications (47)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 124980U (2023) https://doi.org/10.1117/12.2655986
KEYWORDS: Polymers, Polymethylmethacrylate, Spectroscopy, Molecular interactions, Molecules, FT-IR spectroscopy, Atomic layer deposition, Vacuum, Silicon, Semiconducting wafers

Proceedings Article | 30 April 2023 Presentation
Mingqi Li, Emad Aqad, Tomas Marangoni, James Cameron, Paul LaBeaume, Jung-June Lee, Jae-Hwan Sim, Choong Bong Lee, Xisen Hou, Michael Eller, Stanislav Verkhorurov, Emile Schweikert, Peter Trefonas, Chengbai Xu
Proceedings Volume 12498, 124980H (2023) https://doi.org/10.1117/12.2657445
KEYWORDS: Optical lithography, Thin films, Semiconductors, Semiconductor manufacturing, Photoresist materials, Manufacturing, Lithography

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 116120Q (2021) https://doi.org/10.1117/12.2586516
KEYWORDS: Nanostructures, Photomasks, Nanolithography, Control systems, Ultraviolet radiation, Thin films, Nanodomains, Interfaces, Fabrication, Electron beams

SPIE Journal Paper | 28 January 2021 Open Access
Charlotte Cutler, James Thackeray, Peter Trefonas, Dan Millward, Choong Bong Lee, Chris Mack
JM3, Vol. 20, Issue 01, 010901, (January 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.1.010901
KEYWORDS: Line width roughness, Nanoimprint lithography, Diffusion, Etching, Diffractive optical elements, Photoresist processing, Image analysis, Image processing, Semiconducting wafers, Photoresist materials

Proceedings Article | 21 August 2020 Presentation
Trevor Roberts, Rongfeng Yuan, Limin Xiang, Ke Yang, Ravi Pokhrel, Peter Trefonas, Ke Xu, Naomi Ginsberg
Proceedings Volume 11464, 1146408 (2020) https://doi.org/10.1117/12.2568212
KEYWORDS: Crystals, Polymers, Atomic force microscopy, Particles, Diffusion, Oxides, Organic semiconductors, Phase imaging, Lithium, Thin films

Showing 5 of 47 publications
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