Dr. Peter Trefonas
Fellow at DuPont Electronics & Imaging
SPIE Involvement:
Publications (43)

Proceedings Article | 21 August 2020 Presentation
Proc. SPIE. 11464, Physical Chemistry of Semiconductor Materials and Interfaces XIX
KEYWORDS: Crystals, Polymers, Atomic force microscopy, Particles, Diffusion, Oxides, Organic semiconductors, Phase imaging, Lithium, Thin films

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Ions, Photoresist materials, Gold, Molecules, Photoresist developing, Molecular electronics, Mass spectrometry, Nanoparticles, Silicon, Antireflective coatings

SPIE Journal Paper | 13 September 2019
JM3 Vol. 18 Issue 03

SPIE Journal Paper | 6 June 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Ions, Polymers, Silicon, Photoresist materials, Mass spectrometry, Molecules, Photoresist developing, Neodymium, Gold, Chemical analysis

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Ions, Silicon, Polymers, Chemical analysis, Mass spectrometry, Chemically amplified resists, Molecules, Gold, Semiconducting wafers

Showing 5 of 43 publications
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