Dr. Peter Weissbrodt
Vice President Microoptics at JENOPTIK Optical Systems GmbH
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 6 February 2008
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Microlens array, Etching, Ions, Calcium, Photoresist materials, Diffusers, Photomasks, Semiconducting wafers, Optics manufacturing, Binary data

Proceedings Article | 7 March 2007
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Optical components, Lithography, Electron beam lithography, Optical lithography, Manufacturing, Micro optics, Photomasks, Chemical elements, Optics manufacturing, Near field optics

Proceedings Article | 15 October 2005
Proc. SPIE. 5962, Optical Design and Engineering II
KEYWORDS: Optical components, Lithographic illumination, Silica, Polarization, Polarizers, Optical testing, Near field, Beam shaping, Binary data, Near field optics

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Diffraction, Optical design, Deep ultraviolet, Polarization, Optical properties, Multiplexing, Chemical elements, Binary data, Dielectric polarization, Diffraction gratings

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Diffraction, Lithographic illumination, Diffractive optical elements, Silica, Inspection, Control systems, Near field, Beam shaping, Optical alignment

Showing 5 of 18 publications
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