Peter Zandbergen
at Philips Research
SPIE Involvement:
Publications (9)

Proceedings Article | 15 March 2006 Paper
Proceedings Volume 6154, 61541H (2006)
KEYWORDS: Diffraction, Reticles, Photomasks, Binary data, Polarization, Signal attenuation, Chromium, Optical proximity correction, Printing, Phase shifts

Proceedings Article | 12 May 2005 Paper
Proceedings Volume 5754, (2005)
KEYWORDS: Diffraction, Photomasks, Polarization, Chromium, Binary data, Semiconducting wafers, Critical dimension metrology, Reticles, Optical proximity correction, Near field

Proceedings Article | 4 May 2005 Paper
Proceedings Volume 5753, (2005)
KEYWORDS: Particles, Immersion lithography, Point spread functions, Pellicles, Defect detection, Monochromatic aberrations, Scanning electron microscopy, Liquids, Mie scattering, Scattering

Proceedings Article | 5 July 2000 Paper
Proceedings Volume 4000, (2000)
KEYWORDS: Critical dimension metrology, Photomasks, Reticles, Resolution enhancement technologies, 193nm lithography, Monte Carlo methods, Binary data, Lithographic illumination, Optical lithography, Lithography

Proceedings Article | 26 July 1999 Paper
Proceedings Volume 3679, (1999)
KEYWORDS: Fiber optic illuminators, Photomasks, 193nm lithography, Binary data, Lithography, Optical lithography, Phase shifts, Lithographic illumination, Photoresist processing, Optics manufacturing

Showing 5 of 9 publications
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