Dr. Peter J. de Groot
Executive Director of R&D at Zygo Corp
SPIE Involvement:
| Fellow status | Conference Program Committee | Conference Chair | Author | Editor | Instructor
Area of Expertise:
Interferometry , Optical metrology , Intellectual property protection , R&D management , Science education
Websites:
Profile Summary

Peter is a Physics PhD specializing in applied optics. Peter has published 150 technical papers, tutorials and book chapters in the fields of physics, optical testing, surface structure analysis, semiconductor wafer process metrology, stage motion measurement, international standards for metrology, and large-scale coordinate measurement. His research has led to 135 US patents and several commercial products. He is a Fellow of the SPIE and of the Optical Society of America, an Honorary Professor at the University of Nottingham, winner of the Rudolf Kingslake medal, a multiple award winner for innovation, a conference organizer and active contributor in the optics community
Publications (41)

PROCEEDINGS ARTICLE | September 7, 2018
Proc. SPIE. 10834, Speckle 2018: VII International Conference on Speckle Metrology
KEYWORDS: Light sources, Metrology, Coherence (optics), Interferometers, Cameras, Sensors, Interferometry, Fiber optics sensors, Diffusers, Fizeau interferometers

PROCEEDINGS ARTICLE | August 18, 2018
Proc. SPIE. 10749, Interferometry XIX
KEYWORDS: Signal to noise ratio, Microscopes, Metrology, Microscopy, Interference (communication), Data acquisition, Image filtering, Silicon carbide, Environmental sensing, Surface finishing

PROCEEDINGS ARTICLE | August 7, 2018
Proc. SPIE. 10829, Fifth European Seminar on Precision Optics Manufacturing
KEYWORDS: Optical components, Optical transfer functions, Metrology, Spatial frequencies, Cameras, Error analysis, Spectral resolution, Laser metrology, Surface finishing, Fizeau interferometers

PROCEEDINGS ARTICLE | May 21, 2018
Proc. SPIE. 10676, Digital Optics for Immersive Displays
KEYWORDS: Optical components, Diamond turning, Metrology, Interferometers, Cameras, Glasses, Interferometry, Optical metrology, Planar waveguides, RGB color model

SPIE Journal Paper | September 8, 2017
OE Vol. 56 Issue 11
KEYWORDS: Interferometry, Metrology, Optical engineering, Interferometers, Optics manufacturing, Microscopy, Distance measurement, Physics, Optical fabrication, Speckle

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X
KEYWORDS: Confocal microscopy, Microscopes, Metrology, 3D imaging standards, Coherence (optics), Calibration, Inspection, Interferometry, Optical testing, Optical metrology, Profiling, 3D metrology, Optical calibration, Standards development

Showing 5 of 41 publications
Conference Committee Involvement (36)
Applied Optical Metrology III
11 August 2019 | San Diego, California, United States
Optical Measurement Systems for Industrial Inspection XI
24 June 2019 | Munich, Germany
Interferometry XIX
21 August 2018 | San Diego, California, United States
Optical Manufacturing and Testing XII
20 August 2018 | San Diego, California, United States
Optical Micro- and Nanometrology
25 April 2018 | Strasbourg, France
Showing 5 of 36 published special sections
Course Instructor
SC795: Interference Microscopy
We begin with a review of the principles of interferometry using language and visuals accessible to a broad audience. A survey of instruments takes us from early Fizeau interferometers to automated phase shifting systems and finally to vertically scanned white-light interferometers—presently the most widely used microscope for general-purpose profiling. We then advance to modern principles of interference microscopy, including mathematical modeling, analysis of complex surface structures, thin films and dynamic measurements. Armed with this background, we proceed to applications, data interpretation and presentation, supported by a gallery of examples including automotive parts, flat panel displays, data storage and MEMS devices, aspheric optics and semiconductor wafers.
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