Dr. Petr Cizmar
Guest Researcher at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Conference Program Committee | Author
Publications (7)

PROCEEDINGS ARTICLE | September 16, 2014
Proc. SPIE. 9236, Scanning Microscopies 2014
KEYWORDS: Signal to noise ratio, Electron beams, Metrology, Contamination, Fluctuations and noise, Electron microscopes, Distortion, Scanning electron microscopy, Particle beams, Electroluminescent displays

PROCEEDINGS ARTICLE | August 27, 2014
Proc. SPIE. 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
KEYWORDS: Signal to noise ratio, Electron beams, Metrology, Contamination, Fluctuations and noise, Electron microscopes, Distortion, Scanning electron microscopy, Particle beams, Electroluminescent displays

PROCEEDINGS ARTICLE | April 5, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Physics, 3D modeling, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Dimensional metrology, Critical dimension metrology, Signal detection, Model-based design

PROCEEDINGS ARTICLE | May 11, 2011
Proc. SPIE. 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
KEYWORDS: Signal to noise ratio, Microscopes, Metrology, Image processing, Microscopy, Image acquisition, Scanning electron microscopy, Atmospheric physics, Raster graphics, Standards development

PROCEEDINGS ARTICLE | June 3, 2010
Proc. SPIE. 7729, Scanning Microscopy 2010
KEYWORDS: Signal to noise ratio, Microscopes, Metrology, Image resolution, Interference (communication), Distortion, Computer programming, Scanning electron microscopy, Computer programming languages, Standards development

PROCEEDINGS ARTICLE | May 22, 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Contamination, Microscopy, Image acquisition, Electron microscopes, Scanning electron microscopy, Image quality, Distance measurement, Statistical modeling, Standards development, Current controlled current source

Showing 5 of 7 publications
Conference Committee Involvement (2)
Scanning Microscopies 2015
29 September 2015 | Monterey, California, United States
Scanning Microscopies 2014
16 September 2014 | Monterey, California, United States
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