Mr. Petr I. Lazarenko
at MIET
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Thin films, Etching, Electrodes, Germanium, Atomic force microscopy, Microelectronics, Chemical elements, Antimony, Tellurium

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Thin films, Etching, Argon, Germanium, Surface roughness, Atomic force microscopy, Scanning electron microscopy, Reactive ion etching, Antimony, Tellurium

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Semiconductors, Thin films, Electrodes, Germanium, Dielectrics, Chalcogenides, Doping, Aluminum, Bismuth, Antimony

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