The effects of deposition conditions (especially lateral position against target during deposition and deposition
temperature) on optical properties and structure are presented. The X-ray diffraction (XRD) analysis showed that all
the films were polycrystalline with hexagonal structure and preferred orientation in  direction perpendicular to
the substrate surface. Micro-structure properties as crystallite size and micro-strains were not too influenced by
deposition conditions and values of crystallites were evaluated in tens of nanometers and micro-strains were about 10<sup>-2</sup>.
Film thicknesses obtained from transmittance spectra decreased more than two times with increased lateral position of
the samples against the target. Dispersion of the spectral refractive index was observed depending on the sample position
in deposition chamber. Smaller dispersion was observed in series containing more redundant oxygen in their structure.
Microwave thermotherapy (MT) is an oncological treatment. At present the invasive thermometer probes are clinically used for temperature measuring during an MT. Any invasive handling of tumors is of high-risk. A new method of noninvasive monitoring of temperature distribution in tissue has been developed. An MT treatment of the experimentally induced pedicle-tumors of the rat was prepared. It consists of an intelligent regulation loop controlling a high frequency (HF) generator according to the maximal measured temperature in the tissue and a special HF MT applicator. The loop is also equipped with an invasive thermometer (4 invasive probes). During the MT treatment the series of ultrasound B-mode images were obtained. The texture parameters were evaluated form the obtained ultrasound images. These parameters were correlated with the invasively measured temperature during the MT session. For 60 rat samples a strong correlation between the mean gray level in the ROIs in the ultrasound pictures and the invasively measured temperature in the range 37-44 degree(s)C (98.6-111.2 F) was found. The correlation coefficient of the mean gray level and the invasively measured temperature is 0.96+/- 0.05. A system for representation of changes of spatial temperature distribution of the whole tumor during MT will be presented.