Petra M. Schmitt
at CNES
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Microelectromechanical systems, Reliability, Physics, 3D modeling, Capacitance, Profilometers, Finite element methods, Material characterization, Failure analysis, Commercial off the shelf technology

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