Dr. Petri Stenberg
at Dispelix Oy
SPIE Involvement:
Publications (7)

Proceedings Article | 27 February 2015 Paper
Matthieu Roussey, Petri Stenberg, Arijit Bera, Somnath Paul, Jani Tervo, Markku Kuittinen, Seppo Honkanen
Proceedings Volume 9371, 93711T (2015) https://doi.org/10.1117/12.2077418
KEYWORDS: Waveguides, Polarization, Fiber Bragg gratings, Silicon, Refractive index, Photonics, Photonic crystals, Finite-difference time-domain method, Silica, Nanowires

Proceedings Article | 7 March 2014 Paper
M. Roussey, M. Häyrinen, A. Säynätjoki, V. Gandhi, L. Karvonen, P. Stenberg, M. Kuittinen, S. Honkanen
Proceedings Volume 8982, 89820E (2014) https://doi.org/10.1117/12.2038912
KEYWORDS: Waveguides, Atomic layer deposition, Wave propagation, Polarization, Scanning electron microscopy, Light wave propagation, Silicon, Etching, Chromium, Titanium dioxide

Proceedings Article | 19 February 2014 Paper
M. Roussey, A. Bera, P. Stenberg, S. Honkanen, M. Kuittinen
Proceedings Volume 8994, 89940C (2014) https://doi.org/10.1117/12.2036258
KEYWORDS: Waveguides, Photonic crystals, Silicon, Atomic layer deposition, Four wave mixing, Finite-difference time-domain method, Coating, Waveguide modes, Electron beam lithography, Titanium dioxide

SPIE Journal Paper | 2 March 2012
Muhammad Rizwan Saleem, Petri Stenberg, Seppo Honkanen, Jari Turunen, Muhammad Bilal Khan, Zaffar Muhammad Khan
JM3, Vol. 11, Issue 1, 013007, (March 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.013007
KEYWORDS: Etching, Silicon, Hydrogen, Reflectivity, Polymers, Nanophotonics, Photoresist processing, Electron beams, Heat treatments, Reactive ion etching

Proceedings Article | 8 February 2012 Paper
M. R. Saleem, P. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, J. Turunen
Proceedings Volume 8249, 82490G (2012) https://doi.org/10.1117/12.907862
KEYWORDS: Etching, Silicon, Polymers, Heat treatments, Reflectivity, Hydrogen, Electron beams, Lithography, Reactive ion etching, Semiconducting wafers

Showing 5 of 7 publications
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