Pey-Yuan Lee
IPQE Engineer at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
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Publications (1)

PROCEEDINGS ARTICLE | July 15, 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Carbon, Contamination, Data modeling, Metals, Materials processing, Manufacturing, Diagnostics, Critical dimension metrology, Material characterization, Plasma

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