Dr. Philip C. Efthimion
Head Plasma Science & Technology Dept at Princeton Plasma Physics Lab
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Reflectors, Patents, Crystals, X-rays, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, X-ray imaging, Spherical lenses, Semiconducting wafers

PROCEEDINGS ARTICLE | September 17, 2014
Proc. SPIE. 9209, Advances in Computational Methods for X-Ray Optics III
KEYWORDS: Sensors, Spectroscopy, Crystals, X-rays, Spectral resolution, Spatial resolution, X-ray imaging, X-ray detectors, Temperature metrology, Plasma

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