Dr. Philip D. Henshaw
Div. Manager at Parsons Corp
SPIE Involvement:
Publications (18)

Proceedings Article | 25 October 2006
Proc. SPIE. 6378, Chemical and Biological Sensors for Industrial and Environmental Monitoring II
KEYWORDS: Detection and tracking algorithms, LIDAR, Sensors, Aerosols, Ultraviolet radiation, Particles, Luminescence, Algorithm development, Signal detection, Atmospheric particles

Proceedings Article | 17 October 2006
Proc. SPIE. 6377, Advanced Environmental, Chemical, and Biological Sensing Technologies IV
KEYWORDS: Optical fibers, Principal component analysis, Statistical analysis, Sensors, Aerosols, Spectroscopy, Luminescence, Optical analysis, Atmospheric particles, Voltage controlled current source

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Beam splitters, Interferometers, Sensors, Ultraviolet radiation, Receivers, Turbulence, Semiconducting wafers, Pulsed laser operation, Wafer testing, Overlay metrology

Proceedings Article | 7 July 1997
Proc. SPIE. 3051, Optical Microlithography X
KEYWORDS: Lithography, Interferometers, Control systems, Turbulence, Semiconducting wafers

Proceedings Article | 7 June 1996
Proc. SPIE. 2726, Optical Microlithography IX
KEYWORDS: Mirrors, Beam splitters, Interferometers, Sensors, Phase shift keying, Turbulence, Phase measurement, Semiconducting wafers, Signal detection, Overlay metrology

Proceedings Article | 8 July 1994
Proc. SPIE. 2241, Inverse Optics III
KEYWORDS: Optical components, Coherence imaging, Genetic algorithms, Image processing, Fourier transforms, Phase retrieval, Speckle pattern, Fractal analysis, Imaging arrays, Inverse optics

Showing 5 of 18 publications
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