Dr. Philip Groeger
at Qoniac GmbH
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Publications (5)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Semiconductors, Logic, Optical lithography, Scanners, Process control, Finite element methods, Extreme ultraviolet lithography, High volume manufacturing, Semiconducting wafers

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Data modeling, Databases, Metals, Scanners, Inspection, Computer simulations, Critical dimension metrology, Semiconducting wafers, Overlay metrology

SPIE Journal Paper | 12 November 2019
JM3 Vol. 18 Issue 04
KEYWORDS: Semiconducting wafers, Forward error correction, Sensors, Scanners, Optimization (mathematics), Control systems, Contamination, Optical lithography, Chemical mechanical planarization, Databases

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Optical lithography, Contamination, Sensors, Scanners, Data acquisition, Optimization (mathematics), Semiconducting wafers

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Critical dimension metrology, Statistical modeling, Data corrections

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