Dr. Philipp Kreutzer Profile

Dr. Philipp Kreutzer

Managing Director at Technische Univ Ilmenau

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Publications (2)

Proceedings Article | 22 May 2009 Paper

Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

Ph. Kreutzer, N. Dorozhovets, E. Manske, R. Füßl, G. Jäger, R. Grünwald

Proceedings Volume 7378, 737816 (2009) https://doi.org/10.1117/12.821794

KEYWORDS: Metrology, Interferometers, Scanning probe microscopy, Monte Carlo methods, Beam splitters, Mirrors, Scanning probe microscopes, Distance measurement, Thermal modeling, Calibration

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Proceedings Article | 11 August 2008 Paper

Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines

R. Füßl, R. Grünwald, Ph. Kreutzer

Proceedings Volume 7064, 70640L (2008) https://doi.org/10.1117/12.797058

KEYWORDS: Interferometers, 3D modeling, Mirrors, Metrology, Time metrology, Analytical research, Mirror pointing, Protactinium, Sensors, Lead

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