A proprietary metrological scanning probe microscope (SPM) with an interferometer, developed by the Institute of
Process Measurement and Sensor Technology at the Ilmenau University of Technology (IPMS), is used as a stationary
probe system in the nanomeasuring and nanopositioning machine (NPMM). Due to the movements of the NPMM, the
total microscope measuring range is 25mm × 25mm × 5mm with a positioning resolution of less than 0.1nm. Examples
for specimens are step height standards and one-dimensional gratings. The repeatability has been determined at less than
0.5nm for measurements on calibrated step height standards and less than 0.2nm for the gratings. The measurement
results of these samples are always directly related to the corresponding measurement uncertainty, which can be
calculated using an uncertainty budget. A new traceable method has been developed using a vectorial modular model.
With this approach, it is possible to quickly insert new sub-models and to individually analyze their effects on the total
measurement uncertainty. The analysis of these effects with regard to their uncertainties is done by Monte Carlo
Simulation (MCS), because some models have partially or fully nonlinear character of which one example is the
interferometer model of the metrological SPM. The complete development and analysis of these models is presented for
one specific measurement task. The measurement results and the corresponding measurement uncertainty were obtained
by Monte Carlo Simulation. Comparisons with the GUM have shown that the proposed procedure is a good alternative to
achieve reasonable measurement results with uncertainty estimation.
The paper deals with the analysis of the uncertainty of high precision long range three-dimensional Nanopositioning and
Nanomeasuring Machines (NPMM). Those high-tech instruments consisting of precision 3d-guides, interferometers, a
3d-reference-mirror and nanoprobes, connected by a stabile frame are subject of research. Especially the interferometer
mirror system characterizes the precision of such machines. Therefore a new vectorial metrological model will be
described to characterize this machine part. Its properties and advantages are shown and the model is used to analyze the
uncertainty budget of a concrete Nanopositioning and Nanomeasuring Machine.