Dr. Philippe Bézard
at imec
SPIE Involvement:
Publications (14)

Proceedings Article | 10 April 2024 Presentation
Philippe Bézard, Remi Vallat, Atefeh Fathzadeh, Konstantina Fillipidou
Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3014622
KEYWORDS: Optical lithography, Sustainability, Gases, Dry etching, Advanced patterning, Advanced packaging, Semiconducting wafers, Passivation, Etching, Pollution control

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12958, 129580L (2024) https://doi.org/10.1117/12.3012753
KEYWORDS: Etching, Chemistry, Gases, Silica, Sustainability, Optical lithography, Fluorine, Dry etching, Climate change, Semiconducting wafers

Proceedings Article | 9 April 2024 Presentation + Paper
Van Tuong Pham, Jeonghoon Lee, Kaushik Sah, Ying-Lin Chen, Seonggil Heo, Soobin Hwang, Kenichi Miyaguchi, Bappaditya Dey, Maria Chistiakova, Peter De Schepper, Philippe Bezard, Sara Paolillo, Danilo De Simone, Hyo Seon Suh, Victor Blanco
Proceedings Volume 12957, 129570V (2024) https://doi.org/10.1117/12.3010934
KEYWORDS: Printing, Extreme ultraviolet, Optical lithography, Etching, Extreme ultraviolet lithography, Design, Cadmium, Source mask optimization, Scanning electron microscopy, Semiconducting wafers

Proceedings Article | 9 April 2024 Presentation + Paper
Lander Verstraete, Hyo Seon Suh, Julie Van Bel, Byeong-U Bak, Seong Eun Kim, Remi Vallat, Philippe Bezard, Matteo Beggiato, Christophe Beral
Proceedings Volume 12956, 129560G (2024) https://doi.org/10.1117/12.3010817
KEYWORDS: Block copolymers, Extreme ultraviolet, Directed self assembly, Annealing, Bridges, Extreme ultraviolet lithography, Polymethylmethacrylate, Materials processing

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 124990F (2023) https://doi.org/10.1117/12.2662857
KEYWORDS: Etching, Carbon, Hydrogen, Lithography, Scanners, Semiconductors, Sustainability

Showing 5 of 14 publications
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