Dr. Philippe Foubert
R&D Team Leader at imec
SPIE Involvement:
Author
Publications (51)

Proceedings Article | 17 March 2021 Poster + Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Oxides, Optical lithography, Contamination, Metals, Coating, Printing, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing

Proceedings Article | 26 February 2021 Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Oxides, Lithography, Optical lithography, Metals, Scanners, Scanning electron microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Photoresist processing

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Photoresist materials, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Thin film coatings, Photoresist developing

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Metals, Particles, Molecules, Coating, Linear filtering, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Liquids

Showing 5 of 51 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top