Dr. Philippe Hurat
Product Management Director at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (34)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Metrology, Inspection, Profiling, Photomasks, Image classification, Optical proximity correction, Algorithm development, Standards development, Resolution enhancement technologies, Classification systems

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Mathematical modeling, Electronics, Integrated optics, Integrated circuits, Semiconductor manufacturing, Optical proximity correction, Integrated circuit design, Optics manufacturing, Design for manufacturability

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Multilayers, Databases, Error analysis, Silicon, Legal, Optical proximity correction, Tolerancing, Integrated circuit design, System on a chip, Intellectual property

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Optical lithography, Deep ultraviolet, Sensors, Databases, Manufacturing, Data processing, Design for manufacturing, Extreme ultraviolet, Optical proximity correction, Optical calibration, Model-based design, Process modeling, Standards development

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Pattern recognition, Manufacturing, Inspection, Photomasks, Mask making, Computer aided design, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Databases, Metals, Manufacturing, Machine learning, Transistors, Semiconductor manufacturing, Optical proximity correction, Raster graphics, Integrated circuit design

Showing 5 of 34 publications
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