Dr. Philippe Hurat
Product Management Director at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (35)

Proceedings Article | 4 April 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Computer aided design, Metals, Resolution enhancement technologies, Optical lithography, CMOS technology, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Double patterning technology, Manufacturing

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Optical proximity correction, Inspection, Metrology, Image classification, Photomasks, Resolution enhancement technologies, Algorithm development, Standards development, Classification systems, Profiling

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Optical proximity correction, Integrated circuit design, Optics manufacturing, Mathematical modeling, Design for manufacturability, Electronics, Integrated circuits, Integrated optics, Semiconductor manufacturing

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Optical proximity correction, Databases, Silicon, System on a chip, Tolerancing, Legal, Integrated circuit design, Error analysis, Multilayers, Intellectual property

Proceedings Article | 30 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Optical proximity correction, Manufacturing, Process modeling, Design for manufacturing, Extreme ultraviolet, Data processing, Databases, Optical calibration, Model-based design, Optical lithography, Sensors, Standards development, Deep ultraviolet

Showing 5 of 35 publications
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