Dr. Philippe Leray
Group leader of Advanced Metrology at IMEC
SPIE Involvement:
Conference Program Committee | Author
Publications (67)

PROCEEDINGS ARTICLE | October 8, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Metrology, Optical lithography, Etching, Scanning electron microscopy, Photomasks, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Polarization, Sensors, Etching, Scanners, Monte Carlo methods, Optical alignment, Overlay metrology, Chemical mechanical planarization

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Optical lithography, Etching, Photomasks, Extreme ultraviolet, Line width roughness, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Stochastic processes

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Logic, Etching, Gallium arsenide, Silicon, Heart, Transmission electron microscopy, Scatterometry, Nanowires

PROCEEDINGS ARTICLE | March 16, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Edge detection, Metrology, Optical lithography, Extreme ultraviolet, Semiconducting wafers, Stochastic processes, System on a chip, Overlay metrology, Back end of line

PROCEEDINGS ARTICLE | April 21, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Metrology, Etching, Scanning electron microscopy, Process control, Photomasks, Extreme ultraviolet, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization

Showing 5 of 67 publications
Conference Committee Involvement (1)
Metrology, Inspection, and Process Control for Microlithography XXXIII
25 February 2019 | San Jose, California, United States
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