Dr. Phillip L. Reu
Senior Member of Technical Staff at Sandia National Labs
SPIE Involvement:
Conference Program Committee | Author
Publications (13)

PROCEEDINGS ARTICLE | September 13, 2012
Proc. SPIE. 8493, Interferometry XVI: Techniques and Analysis
KEYWORDS: Holograms, Digital holography, Detection and tracking algorithms, Opacity, Particles, Computer simulations, Optical simulations, Charge-coupled devices, Reconstruction algorithms, Spherical lenses

SPIE Journal Paper | July 1, 2008
OE Vol. 47 Issue 07
KEYWORDS: Microchannel plates, Optical filters, Heterodyning, Linear filtering, Photodiodes, Electronic filtering, Modulation, Cameras, Spectrum analysis, Optical engineering

PROCEEDINGS ARTICLE | January 6, 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Microscopes, Mirrors, Imaging systems, Silicon, Reliability, Interference (communication), Control systems, Humidity, Laser Doppler velocimetry

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Reticles, Metrology, Silicon, Photomasks, Mask making, Optical alignment, Semiconducting wafers, Projection lithography

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Reflectors, Lithography, Multilayers, Reticles, Chromium, Distortion, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spherical lenses

PROCEEDINGS ARTICLE | May 28, 2003
Proc. SPIE. 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Carbon, Lithography, Mechanics, Silicon, Manufacturing, Scanning electron microscopy, Microelectronics, Photomasks, Silicon carbide, Photomicroscopy

Showing 5 of 13 publications
Conference Committee Involvement (2)
Interferometry XVI: Applications
14 August 2012 | San Diego, California, United States
Interferometry XV: Applications
3 August 2010 | San Diego, California, United States
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