Dr. Phillip L. Reu
Senior Member of Technical Staff at Sandia National Labs
SPIE Involvement:
Conference Program Committee | Author
Publications (13)

Proceedings Article | 13 September 2012
Proc. SPIE. 8493, Interferometry XVI: Techniques and Analysis
KEYWORDS: Holograms, Digital holography, Detection and tracking algorithms, Opacity, Particles, Computer simulations, Optical simulations, Charge-coupled devices, Reconstruction algorithms, Spherical lenses

SPIE Journal Paper | 1 July 2008
OE Vol. 47 Issue 07
KEYWORDS: Microchannel plates, Optical filters, Heterodyning, Linear filtering, Photodiodes, Electronic filtering, Modulation, Cameras, Spectrum analysis, Optical engineering

Proceedings Article | 6 January 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Microscopes, Mirrors, Imaging systems, Silicon, Reliability, Interference (communication), Control systems, Humidity, Laser Doppler velocimetry

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Reticles, Metrology, Silicon, Photomasks, Mask making, Optical alignment, Semiconducting wafers, Projection lithography

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Reflectors, Lithography, Multilayers, Reticles, Chromium, Distortion, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spherical lenses

Showing 5 of 13 publications
Conference Committee Involvement (2)
Interferometry XVI: Applications
14 August 2012 | San Diego, California, United States
Interferometry XV: Applications
3 August 2010 | San Diego, California, United States
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