Dr. Pierre Barritault
Retired at CEA-LETI
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | February 16, 2017
Proc. SPIE. 10106, Integrated Optics: Devices, Materials, and Technologies XXI
KEYWORDS: Mid-IR, Photodetectors, Photonic devices, Gas sensors, Waveguides, Sensors, Germanium, Silicon, Quantum cascade lasers, Multiplexing, Gas lasers, Silicon photonics, Multiplexers, Carbon monoxide, Atmospheric sensing

PROCEEDINGS ARTICLE | December 1, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Data modeling, Spectroscopy, Error analysis, Silicon, Polarimetry, Atomic force microscopy, Scatterometry, 3D metrology, Critical dimension metrology, Diffraction gratings

PROCEEDINGS ARTICLE | April 16, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: 3D imaging standards, Data modeling, Spectroscopy, Silicon, Polarimetry, Atomic force microscopy, 3D metrology, Spectroscopic ellipsometry, Critical dimension metrology, Diffraction gratings

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Ellipsometry, Refractive index, Metrology, Statistical analysis, Error analysis, Silicon, Reflectivity, Polarizers, Scatterometry, Critical dimension metrology

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Diffraction, Scattering, Silicon, Reflectivity, Fourier transforms, Spectroscopic ellipsometry, Double patterning technology, Fourier optics, Overlay metrology, Diffraction gratings

PROCEEDINGS ARTICLE | February 21, 2005
Proc. SPIE. 5647, Laser-Induced Damage in Optical Materials: 2004
KEYWORDS: Optical components, Silica, Spectroscopy, Laser induced damage, Luminescence, Fluorescence spectroscopy, Gas lasers, Cartography, Carbon monoxide, Absorption

Showing 5 of 11 publications
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