Dr. Pierre Barritault
Retired at CEA-LETI
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | February 16, 2017
Proc. SPIE. 10106, Integrated Optics: Devices, Materials, and Technologies XXI
KEYWORDS: Silicon, Waveguides, Mid-IR, Gas sensors, Atmospheric sensing, Multiplexing, Photonic devices, Photodetectors, Germanium, Silicon photonics, Quantum cascade lasers, Multiplexers, Carbon monoxide, Gas lasers, Sensors

PROCEEDINGS ARTICLE | December 1, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Atomic force microscopy, Data modeling, Critical dimension metrology, Polarimetry, Diffraction gratings, Silicon, Spectroscopy, 3D metrology, Scatterometry, Error analysis

PROCEEDINGS ARTICLE | April 16, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Atomic force microscopy, Data modeling, Polarimetry, Critical dimension metrology, Diffraction gratings, 3D metrology, Spectroscopic ellipsometry, Silicon, Spectroscopy, 3D imaging standards

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Critical dimension metrology, Ellipsometry, Scatterometry, Refractive index, Reflectivity, Silicon, Metrology, Polarizers, Error analysis, Statistical analysis

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Overlay metrology, Diffraction gratings, Diffraction, Fourier transforms, Reflectivity, Double patterning technology, Scattering, Fourier optics, Silicon, Spectroscopic ellipsometry

PROCEEDINGS ARTICLE | February 21, 2005
Proc. SPIE. 5647, Laser-Induced Damage in Optical Materials: 2004
KEYWORDS: Luminescence, Silica, Laser induced damage, Cartography, Spectroscopy, Gas lasers, Carbon monoxide, Optical components, Absorption, Fluorescence spectroscopy

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top