Pierre J. P. Chausse
at Univ of Bath
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Nanostructures, Diffraction, MATLAB, Optical lithography, Lithographic illumination, Silicon, Photomasks, Semiconducting wafers, Nanolithography

PROCEEDINGS ARTICLE | June 8, 2017
Proc. SPIE. 10248, Nanotechnology VIII
KEYWORDS: Fabrication, Metamaterials, Lithography, Plasmonics, Nanostructures, Optical lithography, Nanostructuring, Deep ultraviolet, Etching, Photomasks, Nanoimprint lithography, Semiconducting wafers, Nanofabrication, Nanolithography

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