Pierre Pennarun
at CNRS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 July 2005 Paper
Pierre Pennarun, Carole Rossi, Daniel Esteve, Veronique Conedera
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608082
KEYWORDS: Switches, Microelectromechanical systems, Copper, Resistance, Dielectrics, Reliability, Power supplies, Microrelays, Switching, Silicon

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