Pierre Pennarun
at CNRS
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Switches, Switching, Copper, Dielectrics, Silicon, Reliability, Resistance, Power supplies, Microrelays

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