Dr. Pieter Brandt
at MAPPER Lithography
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Point spread functions, Metrology, Logic, Optical lithography, Data modeling, Calibration, Manufacturing, Electroluminescence, Software development, Optical simulations, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Electronic design automation

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Etching, Silicon, Scanning electron microscopy, Line width roughness, Neodymium, Semiconducting wafers, Surface conduction electron emitter displays

SPIE Journal Paper | August 12, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Electron beam direct write lithography, Photovoltaics, Lithium, Immersion lithography, Electron beam lithography, Lithography, Electronic design automation, Field programmable gate arrays, Metals, Optical proximity correction

SPIE Journal Paper | July 2, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Electron beam lithography, Monte Carlo methods, Electroluminescence, Metals, Nano opto mechanical systems, Lithography, Error analysis, Semiconducting wafers, Critical dimension metrology, Overlay metrology

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Photovoltaics, Electron beam lithography, Metals, Field programmable gate arrays, Photomasks, Optical proximity correction, Critical dimension metrology, Electron beam direct write lithography, Electronic design automation

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Cadmium, Metals, Electroluminescence, Monte Carlo methods, Immersion lithography, Critical dimension metrology, Semiconducting wafers, Current controlled current source

Showing 5 of 10 publications
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