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Pinar Demir
at Middle East Technical Univ
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Publications (1)
Proceedings Article | 17 September 2007 Paper
Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application
Pinar Demir, Elif Kacar, Erhan Akman, Sinan Kadri Bilikmen, Arif Demir
Proceedings Volume 6703, 67030B (2007) https://doi.org/10.1117/12.733149
KEYWORDS: Tin, Ions, X-rays, Extreme ultraviolet lithography, Plasmas, Optical simulations, X-ray lithography, Xenon, Laser irradiation, Lithography
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