Dr. Ping-Hung Lu
Senior Research & Development Manager at EMD Performance Materials Corp
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Publications (35)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymers, Silicon, Coating, Chemistry, Manufacturing, Inspection, Fourier transforms, Photoresist materials, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymers, Coating, Fourier transforms, Electroluminescence, Plasma etching, Head-mounted displays, Arsenic, Binary data, Prototyping, Bottom antireflective coatings

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Etching, Polymers, Silicon, Coating, Reflectivity, Fourier transforms, Photoresist materials, Immersion lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | April 15, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Carbon, Lithography, Etching, Silicon, Fourier transforms, Oxygen, Photoresist materials, Photomasks, Reactive ion etching, Semiconducting wafers

PROCEEDINGS ARTICLE | April 15, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Reticles, Polymers, Silicon, Coating, Reflectivity, Fourier transforms, Plasma etching, Prototyping, Plasma, Bottom antireflective coatings

PROCEEDINGS ARTICLE | April 2, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Carbon, Lithography, Antireflective coatings, Etching, Silicon, Reflectivity, Fourier transforms, Photomasks, Silicon carbide, Semiconducting wafers

Showing 5 of 35 publications
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