Ping-Yin Liu
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 November 2002 Paper
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Diamond, Chemical vapor deposition, Surface roughness, Semiconducting wafers, Image processing, Atomic force microscopy, Diamond machining, Raman spectroscopy, Polishing, Spindles

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