Dr. Ping Li
Process Development Manager at NP Photonics Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Infrared detectors, Actuators, Infrared sensors, Optical filters, Mirrors, Fabry–Perot interferometers, Silicon, Chemical analysis, Tunable filters

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