Ping Yang
at Univ of Tokyo
SPIE Involvement:
Author
Area of Expertise:
Micro-CMM , Calibration , Multi-probe method , Metrology , Laser interferometer , Profile measurement
Publications (1)

PROCEEDINGS ARTICLE | September 14, 2011
Proc. SPIE. 8133, Dimensional Optical Metrology and Inspection for Practical Applications
KEYWORDS: Mirrors, Beam splitters, Lasers, Interferometers, Sensors, Receivers, Autocollimators, Laser stabilization, Motion measurement, Laser systems engineering

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