Dr. Ping Zhang
MEMS Engineer at Glimmerglass Networks Inc
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 5 February 2010
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Microelectromechanical systems, Oxides, Mirrors, Switching, Electrodes, Dielectrics, Silicon, Reliability, Micromirrors, Optical switching

Proceedings Article | 19 February 2009
Proc. SPIE. 7204, Micromachining and Microfabrication Process Technology XIV
KEYWORDS: Microelectromechanical systems, Mirrors, Switches, Seaborgium, Reliability, Epoxies, Optical switching, Semiconducting wafers, Optics manufacturing, Wafer bonding

Proceedings Article | 29 November 2007
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Actuators, Optical filters, Mirrors, Silicon, Micromirrors, Free space optics, Dense wavelength division multiplexing, Semiconducting wafers, Active optics

Proceedings Article | 8 January 2007
Proc. SPIE. 6414, Smart Structures, Devices, and Systems III
KEYWORDS: Actuators, Microsystems, Metals, Silicon, Materials processing, Scanning electron microscopy, Photoresist materials, Photomasks, Deep reactive ion etching, Semiconducting wafers

Proceedings Article | 23 January 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Microelectromechanical systems, Actuators, Optical components, Optical filters, Fabry–Perot interferometers, Polymers, Interfaces, Silicon, Filtering (signal processing), Absorption

Showing 5 of 8 publications
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