Dr. Pinyen Lin Profile

Dr. Pinyen Lin

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Publications (2)

Proceedings Article | 23 March 2016 Paper

450mm etch process development and process chamber evaluation using 193i DSA guided pattern

Wenli Collison, Yii-Cheng Lin, Shannon Dunn, Hiroaki Takikawa, James Paris, Lucy Chen, Troy Detrick, Jun Belen, George Stojakovic, Michael Goss, Norman Fish, Minjoon Park, Chih-Ming Sun, Mark Kelling, Pinyen Lin

Proceedings Volume 9782, 97820M (2016) https://doi.org/10.1117/12.2218537

KEYWORDS: Etching, Semiconducting wafers, Data processing, Lithography, Directed self assembly, Optical lithography, Tin, Photoresist processing, Line edge roughness, Polymethylmethacrylate

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Proceedings Article | 1 July 2004 Paper

Optical MEMS platform for low-cost on-chip integration of planar light circuits and optical switching

Kristine German, Joel Kubby, Jingkuang Chen, James Diehl, Kathleen Feinberg, Peter Gulvin, Larry Herko, Nancy Jia, Pinyen Lin, Xueyuan Liu, Jun Ma, John Meyers, Peter Nystrom, Yao Rong Wang

Proceedings Volume 5357, (2004) https://doi.org/10.1117/12.528996

KEYWORDS: Waveguides, Switches, Microelectromechanical systems, Optical switching, Photonic integrated circuits, Silicon, Actuators, Integrated optics, Microopto electromechanical systems, Optics manufacturing

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