Dr. Pinyen Lin
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 23, 2016
Proc. SPIE. 9782, Advanced Etch Technology for Nanopatterning V
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Etching, Data processing, Directed self assembly, Line edge roughness, Photoresist processing, Semiconducting wafers, Tin

PROCEEDINGS ARTICLE | July 1, 2004
Proc. SPIE. 5357, Optoelectronic Integration on Silicon
KEYWORDS: Microelectromechanical systems, Actuators, Switches, Waveguides, Silicon, Microopto electromechanical systems, Integrated optics, Photonic integrated circuits, Optical switching, Optics manufacturing

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