Dr. Piotr Firek Profile

Dr. Piotr Firek

at Warsaw University of Technology

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Author

Publications (16)

Proceedings Article | 6 November 2019 Paper

Preparation of MoS2 films for sensor applications

Bartłomiej Stonio, Piotr Firek, Andrzej Taube, Jan Szmidt

Proceedings Volume 11176, 1117656 (2019) https://doi.org/10.1117/12.2536814

KEYWORDS: Molybdenum, Chemical vapor deposition, Sensors, Raman spectroscopy, Atomic force microscopy

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Proceedings Article | 6 November 2019 Paper

Technology and characterization of ISFET structures with graphene membrane

Kinga Kondracka, Piotr Firek, Piotr Caban, Aleksandra Przewłoka, Jan Szmidt

Proceedings Volume 11176, 111764X (2019) https://doi.org/10.1117/12.2536746

KEYWORDS: Graphene, Transistors, Field effect transistors, Sensors, Germanium, Oxides, Optical lithography, Silicon, Phosphorus, Copper

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Proceedings Article | 6 November 2019 Paper

Influence of annealing on electronic properties of thin AlN films deposited by magnetron sputtering method on silicon substrates

P. Firek, M. Waskiewicz, K. Zdunek, J. Szmidt, R. Chodun, K. Nowakowska-Langier

Proceedings Volume 11176, 111764R (2019) https://doi.org/10.1117/12.2536649

KEYWORDS: Aluminum nitride, Annealing, Sputter deposition, Dielectrics, Thin films, Silicon

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Proceedings Article | 1 October 2018 Paper

Technology of field effect transistor with DLC layer in gate area

Piotr Firek, Aleksander Werbowy, Mateusz Śmietana

Proceedings Volume 10808, 1080852 (2018) https://doi.org/10.1117/12.2501537

KEYWORDS: Dielectrics, Transistors, Field effect transistors, Silicon, Plasma, Chemical vapor deposition, Silicon films, Thin films, Diamond, Deposition processes

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Proceedings Article | 7 August 2017 Paper

Long time stability of lamps with nanostructural carbon field emission cathodes

J. Kalenik, P. Firek, J. Szmidt, E. Czerwosz, M. Kozłowski, I. Stępińska, T. Wódka

Proceedings Volume 10445, 104450P (2017) https://doi.org/10.1117/12.2280971

KEYWORDS: Lamps, Carbon, Carbon nanotubes, Light sources and illumination, Electrons, Nickel, Luminescence, Chemical vapor deposition, Sensors, Head

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Proceedings Article | 7 August 2017 Paper

SEM and Raman studies of CNT films on porous Si

R. Belka, J. Kęczkowska, M. Suchańska, P. Firek, H. Wronka, M. Kozłowski, J. Radomska, E. Czerwosz, F. Craciunoiu

Proceedings Volume 10445, 104454P (2017) https://doi.org/10.1117/12.2279986

KEYWORDS: Scanning electron microscopy, Raman spectroscopy, Silicon

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Proceedings Article | 22 December 2016 Paper

Characterization thin films TiO2 obtained in the magnetron sputtering process

Maciej Kamiński, Piotr Firek, Piotr Caban

Proceedings Volume 10175, 1017516 (2016) https://doi.org/10.1117/12.2261873

KEYWORDS: Titanium dioxide, Sputter deposition, Thin films, Dielectrics, Capacitors, Silicon films, Silicon, Gases, Oxides, Atomic force microscope

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Proceedings Article | 22 December 2016 Paper

Manufacturing of HfOxNy films using reactive magnetron sputtering for ISFET application

Piotr Firek, Piotr Wysokiński

Proceedings Volume 10175, 1017507 (2016) https://doi.org/10.1117/12.2261660

KEYWORDS: Hybrid fiber optics, Dielectrics, Argon, Sputter deposition, Personal digital assistants, Field effect transistors, Manufacturing, Deposition processes, Capacitors, Annealing

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Proceedings Article | 11 September 2015 Paper

Raman studies of C-Ni/Ti films deposited on Si (100)

R. Belka, J. Keczkowska, M. Suchańska, P. Firek, H. Wronka, J. Radomska, E. Czerwosz

Proceedings Volume 9662, 966249 (2015) https://doi.org/10.1117/12.2205546

KEYWORDS: Silicon, Raman spectroscopy, Carbon, Titanium, Principal component analysis, Fullerenes, Thin films, Nanocomposites, Sputter deposition, Nickel

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Proceedings Article | 11 September 2015 Paper

Influence of temperature and humidity on titanium electrodes intended for an above normative conditions sensors

Mateusz Mroczkowski, Piotr Firek, Jerzy Kalenik, Mirosław Kozłowski, Jan Szmidt, Ewa Kowalska, Elżbieta Czerwosz

Proceedings Volume 9662, 966243 (2015) https://doi.org/10.1117/12.2204814

KEYWORDS: Sensors, Hydrogen, Electrodes, Titanium, Resistance, Temperature metrology, Humidity, Palladium, Aluminum, Annealing

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Proceedings Article | 11 September 2015 Paper

Influence of substrate type on structure of C-Pd thin films

Ewa Kowalska, Elżbieta Czerwosz, Miroslaw Kozłowski, Piotr Firek

Proceedings Volume 9662, 96624M (2015) https://doi.org/10.1117/12.2205854

KEYWORDS: Palladium, Scanning electron microscopy, Silicon, Carbon, Chemical vapor deposition, Hydrogen, Semiconducting wafers, Electrons, Thin films, Sensors

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Proceedings Article | 1 July 2015 Paper

Sensing properties of periodic stack of nano-films deposited with various vapor-based techniques on optical fiber end-face

Marcin Koba, Radosław Różycki-Bakon, Piotr Firek, Mateusz Śmietana

Proceedings Volume 9655, 96550R (2015) https://doi.org/10.1117/12.2185153

KEYWORDS: Plasma enhanced chemical vapor deposition, Temperature metrology, Optical fibers, Thin films, Structured optical fibers, Neodymium, Single mode fibers, Aluminum, Oxides, Titanium dioxide

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Proceedings Article | 7 December 2013 Paper

Comparison of Al2O3 nano-overlays deposited with magnetron sputtering and atomic layer deposition on optical fibers for sensing purposes

Mateusz Śmietana, Tomasz Drążewski, Piotr Firek, Predrag Mikulic, Wojtek Bock

Proceedings Volume 8923, 89231G (2013) https://doi.org/10.1117/12.2033792

KEYWORDS: Atomic layer deposition, Optical fibers, Optical properties, Semiconducting wafers, Silicon, Sputter deposition, Deposition processes, Thin films, Cladding, Refractive index

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Proceedings Article | 25 July 2013 Paper

Characterization of thin Gd2O3 magnetron sputtered layers

Jacek Gryglewicz, Piotr Firek, Jakub Jaśiński, Robert Mroczyński, Jan Szmidt

Proceedings Volume 8902, 89022M (2013) https://doi.org/10.1117/12.2031230

KEYWORDS: Refractive index, Oxygen, Sputter deposition, Radium, Oxides, Aluminum, Dielectrics, Silicon, Gadolinium, Argon

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Proceedings Article | 25 July 2013 Paper

Reactive impulse plasma ablation deposited barium titanate thin films on silicon

A. Werbowy, P. Firek, N. Kwietniewski, A. Olszyna

Proceedings Volume 8902, 89022O (2013) https://doi.org/10.1117/12.2031267

KEYWORDS: Ferroelectric materials, Dielectrics, Thin films, Plasma, Silicon, Ceramics, Electrodes, Atomic force microscopy, Scanning electron microscopy, Silicon films

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Proceedings Article | 25 July 2013 Paper

Properties of carbonaceous-palladium hydrogen sensor

Anna Kamińska, Sławomir Krawczyk, Halina Wronka, Elżbieta Czerwosz, Piotr Firek, Jerzy Kalenik, Jan Szmidt

Proceedings Volume 8902, 89021T (2013) https://doi.org/10.1117/12.2030826

KEYWORDS: Electrodes, Titanium, Hydrogen, Silver, Palladium, Sensors, Scanning electron microscopy, Resistance, Deposition processes, Nitrogen

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Showing 5 of 16 publications

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