Prof. Piotr B. Grabiec Profile

Prof. Piotr B. Grabiec

Head of Electron Technology at Institute of Microelectronics and Photonics

SPIE Involvement:

Author

Publications (40)

Proceedings Article | 10 November 2016 Paper

Thin film two-electrode impedance sensor development and tests

Michał Zaborowski, Anna Baraniecka, Jerzy Zając, Krzysztof Domański, Piotr Grabiec

Proceedings Volume 10161, 101610Y (2016) https://doi.org/10.1117/12.2244502

KEYWORDS: Sensors, Semiconducting wafers, Electrodes, Silicon, Skin, Glasses, Thin films, Gold, Electroluminescence, Wet etching

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Proceedings Article | 10 November 2016 Paper

Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes

Piotr Prokaryn, Pawel Janus, Jerzy Zajac, Andrzej Sierakowski, Krzysztof Domanski, Piotr Grabiec

Proceedings Volume 10161, 1016107 (2016) https://doi.org/10.1117/12.2245041

KEYWORDS: Deposition processes, Gold, Silicon, Sensors, Calibration, Electrodes, Profilometers, Platinum, Velocity measurements, Metals

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Proceedings Article | 10 November 2016 Paper

Innovative multi-cantilever array sensor system with MOEMS read-out

F. Ivaldi, T. Bieniek, P. Janus, P. Grabiec, W. Majstrzyk, D. Kopiec, T. Gotszalk

Proceedings Volume 10161, 1016102 (2016) https://doi.org/10.1117/12.2244154

KEYWORDS: Sensors, Microopto electromechanical systems, Micromirrors, Calibration, Electronics, Head, Laser sources, System integration, Signal to noise ratio, Data acquisition

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Proceedings Article | 10 November 2016 Paper

Soft dielectric cantilevers with silicon tips for atomic force microscopy applications

Paweł Janus, Rafał Dobrowolski, Andrzej Sierakowski, Francesco Ivaldi, Dariusz Szmigiel, Jerzy Zając

Proceedings Volume 10161, 1016104 (2016) https://doi.org/10.1117/12.2244789

KEYWORDS: Atomic force microscopy, Dielectrics, Silicon, Manufacturing, Silica, Finite element methods, Etching, Sensors, Optics manufacturing, Deep reactive ion etching

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Proceedings Article | 10 November 2016 Paper

Polymer microfluidic bioreactor fabrication by means of gray scale lithography technique

Andrzej Sierakowski, Piotr Prokaryn, Rafał Dobrowolski, Anna Malinowska, Dariusz Szmigiel, Piotr Grabiec, Damian Trojanowski, Dagmara Jakimowicz, Jolanta Zakrzewska-Czerwinska

Proceedings Volume 10161, 1016106 (2016) https://doi.org/10.1117/12.2245033

KEYWORDS: Microfluidics, Fabrication, Polymers, Lithography, Photoresist materials, 3D modeling, Silicon, Optical lithography, Process modeling, Polymethylmethacrylate

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Proceedings Article | 16 September 2014 Paper

Shear force microscopy using piezoresistive cantilevers in surface metrology

Teodor Gotszalk, Daniel Kopiec, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec, Ivo Rangelow

Proceedings Volume 9236, 92360A (2014) https://doi.org/10.1117/12.2066247

KEYWORDS: Metrology, Atomic force microscopy, Actuators, Microscopy, Calibration, Sensors, Wheatstone bridges, Standards development, Optical fibers, Silicon

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Proceedings Article | 16 September 2014 Paper

Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantilever

Paweł Janus, Piotr Grabiec, Andrzej Sierakowski, Teodor Gotszalk, Maciej Rudek, Daniel Kopiec, Wojciech Majstrzyk, Guillaume Boetsch, Bernd Koehler

Proceedings Volume 9236, 92360R (2014) https://doi.org/10.1117/12.2066240

KEYWORDS: Silicon, Sensors, Wheatstone bridges, Optical lithography, Microscopy, Electronics, Platinum, Semiconducting wafers, Bridges, Amplifiers

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Proceedings Article | 19 August 2014 Paper

Thermal energy harvesters with piezoelectric or electrostatic transducer

Piotr Prokaryn, Krzysztof Domański, Michał Marchewka, Daniel Tomaszewski, Piotr Grabiec, Onoriu Puscasu, Stéphane Monfray, Thomas Skotnicki

Proceedings Volume 9291, 92910E (2014) https://doi.org/10.1117/12.2070512

KEYWORDS: Capacitors, Transducers, Electrodes, Aluminum, Silicon, Data acquisition, Polymethylmethacrylate, Silica, Capacitance, Diodes

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Proceedings Article | 19 August 2014 Paper

32-element beta detector developed at the Institute of Electron Technology (ITE)

Maciej Węgrzecki, Alexander Yakushev, Jan Bar, Tadeusz Budzyński, Piotr Grabiec, Helena Kłos, Andrzej Panas, Wojciech Słysz, Maciej Stolarski, Dariusz Szmigiel, Iwona Węgrzecka, Michał Zaborowski

Proceedings Volume 9291, 929106 (2014) https://doi.org/10.1117/12.2070036

KEYWORDS: Sensors, Detector development, Silicon, Semiconducting wafers, Diffusion, Boron, Aluminum, Etching, Phosphorus, Oxidation

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Proceedings Article | 19 August 2014 Paper

64-element photodiode array for scintillation detection of x-rays

Maciej Węgrzecki, Dariusz Wolski, Jan Bar, Tadeusz Budzyński, Arkadiusz Chłopik, Piotr Grabiec, Helena Kłos, Andrzej Panas, Tadeusz Piotrowski, Wojciech Słysz, Maciej Stolarski, Dariusz Szmigiel, Iwona Węgrzecka, Michał Zaborowski

Proceedings Volume 9291, 929104 (2014) https://doi.org/10.1117/12.2069837

KEYWORDS: Photodiodes, Scintillators, Silicon, Photography, Scintillation, Aluminum, Detector arrays, X-ray detectors, X-rays, Lead

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Proceedings Article | 19 August 2014 Paper

The novel method of adhesive bonding in technology of semiconductor fluidic systems

Helena Kłos, Piotr Prokaryn, Andrzej Sierakowski, Maciej Węgrzecki, Jan Bar, Piotr Grabiec

Proceedings Volume 9291, 929107 (2014) https://doi.org/10.1117/12.2070042

KEYWORDS: Polymers, Semiconducting wafers, Sensors, Aluminum, Adhesives, Wafer bonding, Gold, Semiconductors, Microelectromechanical systems, Glasses

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