Dr. Piotr T. Jedrasik
at Chalmers Univ of Technology
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Electron beam lithography, Electron beams, Scattering, Calibration, Hydrogen, Laser scattering, Analytical research, Critical dimension metrology, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Electron beam lithography, Point spread functions, Scattering, Molecules, Silicon, Scanning electron microscopy, Data conversion, Electron beam direct write lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | July 26, 1999
Proc. SPIE. 3679, Optical Microlithography XII
KEYWORDS: Lithography, Point spread functions, Optical filters, Optical design, Statistical analysis, Deep ultraviolet, Projection systems, Image filtering, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | June 25, 1999
Proc. SPIE. 3676, Emerging Lithographic Technologies III
KEYWORDS: Electron beam lithography, Point spread functions, Detection and tracking algorithms, Scattering, Error analysis, Computer simulations, Artificial neural networks, Neural networks, Transistors, Neurons

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top