Dr. Piotr Marczuk
Project Manager at Berliner Glas KGaA Herbert Kubatz GmbH & Co
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 18, 2004
Proc. SPIE. 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
KEYWORDS: Mirrors, Metals, Reflectivity, Optical fabrication, Extreme ultraviolet, Palladium, Extreme ultraviolet lithography, Optics manufacturing, EUV optics, Light

PROCEEDINGS ARTICLE | January 13, 2004
Proc. SPIE. 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
KEYWORDS: Reflectors, Mirrors, Photons, Nickel, Reflectivity, Optical fabrication, Optical testing, Extreme ultraviolet, Palladium, EUV optics

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