Dr. Piotr Prokaryn
at Institute of Electron Technology
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | December 22, 2016
Proc. SPIE. 10175, Electron Technology Conference 2016
KEYWORDS: Photovoltaics, Sensors, Photography, Laser applications, Laser development, Photodiodes, Laser stabilization, Photomasks, Aluminum, Laser metrology

PROCEEDINGS ARTICLE | November 10, 2016
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Fabrication, Lithography, Microfluidics, Optical lithography, Polymethylmethacrylate, Polymers, Silicon, 3D modeling, Photoresist materials, Process modeling

PROCEEDINGS ARTICLE | November 10, 2016
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Gold, Sensors, Calibration, Electrodes, Metals, Silicon, Platinum, Profilometers, Deposition processes, Velocity measurements

PROCEEDINGS ARTICLE | August 19, 2014
Proc. SPIE. 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors
KEYWORDS: Microelectromechanical systems, Semiconductors, Gold, Sensors, Polymers, Glasses, Aluminum, Semiconducting wafers, Adhesives, Wafer bonding

PROCEEDINGS ARTICLE | August 19, 2014
Proc. SPIE. 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors
KEYWORDS: Polymethylmethacrylate, Capacitors, Silica, Electrodes, Silicon, Data acquisition, Capacitance, Transducers, Diodes, Aluminum

PROCEEDINGS ARTICLE | September 22, 2003
Proc. SPIE. 5124, Optoelectronic and Electronic Sensors V
KEYWORDS: Statistical analysis, Microsystems, Cadmium, Metals, Copper, Ions, Mercury, Zinc, Chemical analysis, Lead

Showing 5 of 6 publications
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