Piotr Wiśniewski
at Warsaw Univ of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 December 2016 Paper
Proceedings Volume 10175, 101750F (2016) https://doi.org/10.1117/12.2261676
KEYWORDS: Reactive ion etching, Silicon, Argon, Etching, Nanoelectronics, Microelectronics, Plasma, Sulfur, Anisotropy, Nanotechnology

Proceedings Article | 22 December 2016 Paper
Proceedings Volume 10175, 101750J (2016) https://doi.org/10.1117/12.2261752
KEYWORDS: Numerical analysis, Silicon, Field effect transistors, Semiconductors, Transistors, Oxides, Process modeling, Molybdenum, Doping, Microelectronics

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