Dr. Placid Ferreira
Grayce Wicall Gauthier Prof of Mech Sci and Engg at Univ of Illinois
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 7 February 2009
Proc. SPIE. 7229, Vertical-Cavity Surface-Emitting Lasers XIII
KEYWORDS: Oxides, Mirrors, Surface plasmons, Finite-difference time-domain method, Optical lithography, Metals, Silver, Chromium, Near field, Vertical cavity surface emitting lasers

Proceedings Article | 9 September 2008
Proc. SPIE. 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II
KEYWORDS: Actuators, Nanotechnology, Prisms, Metrology, Statistical analysis, Sensors, Calibration, Error analysis, Laser interferometry, Sensor calibration

Proceedings Article | 26 February 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Fabrication, Actuators, Optical lithography, Sensors, Etching, Silicon, Kinematics, Finite element methods, Aluminum, Plasma

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Actuators, Silica, Sensors, Metals, Crystals, Silicon, Kinematics, Photomasks, Microfabrication, Semiconducting wafers

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