Po-Hung Yao
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 September 2002
Proc. SPIE. 4907, Optical Switching and Optical Interconnection II
KEYWORDS: Microelectromechanical systems, Diffraction, Etching, Polymers, Laser applications, Scanning electron microscopy, Laser ablation, Micro optics, Excimer lasers, Diffraction gratings

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