Po Sun
at Jabil Circuit Inc
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 1 April 2010
JM3, Vol. 9, Issue 02, 023011, (April 2010) https://doi.org/10.1117/12.10.1117/1.3427162
KEYWORDS: Photonic crystals, Gold, Reflectivity, Polymethylmethacrylate, Photomasks, Metals, X-rays, Numerical simulations, X-ray lithography, Lithography

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