Dr. Poul-Erik Hansen
Senior Scientiest at Danish Fundamental Metrology Institut
SPIE Involvement:
Publications (9)

Proceedings Article | 2 March 2020
Proc. SPIE. 11291, Quantum Dots, Nanostructures, and Quantum Materials: Growth, Characterization, and Modeling XVII
KEYWORDS: Electron beam lithography, Diffraction, Data modeling, Scanning electron microscopy, Scatterometry, Molecular beam epitaxy, Nanowires

Proceedings Article | 26 June 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Modeling, Thin films, Ellipsometry, Metrology, Nanostructuring, Scattering, Silicon, Reflectivity, Surface roughness, Scatterometry, Optical metrology, Inverse problems, Nanostructured thin films

Proceedings Article | 11 October 2015
Proc. SPIE. 9633, Optifab 2015
KEYWORDS: Refractive index, Polishing, Reflection, Scattering, Interfaces, Light scattering, Bidirectional reflectance transmission function, Scatter measurement, Surface finishing, Liquids

Proceedings Article | 20 August 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Metrology, Calibration, X-rays, Silicon, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Scatterometry, Critical dimension metrology, Standards development

Proceedings Article | 1 May 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Diffraction, Metrology, Calibration, Silicon, Atomic force microscopy, Scanning electron microscopy, Scatterometry, Scatter measurement, Standards development, Diffraction gratings

Showing 5 of 9 publications
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