Dr. Pradeep K. Subrahmanyan
Director at KLA-Tencor Corp
SPIE Involvement:
Conference Program Committee | Author
Websites:
Publications (5)

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Diffraction, Metrology, Lithographic illumination, Ions, Process control, Photomasks, Semiconductor manufacturing, Artificial intelligence, SRAF, Semiconducting wafers, Binary data, Personal protective equipment, Phase shifts

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7132, Laser-Induced Damage in Optical Materials: 2008
KEYWORDS: Polishing, Atmospheric plasma, Silica, Chemical species, Glasses, Optics manufacturing, Precision optics, Surface finishing, Plasma, Lead

PROCEEDINGS ARTICLE | July 23, 2008
Proc. SPIE. 7018, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation
KEYWORDS: Mirrors, Astronomy, Polishing, Atmospheric plasma, Spatial frequencies, Chemical species, Space telescopes, Abrasives, Optics manufacturing, Plasma

PROCEEDINGS ARTICLE | September 15, 2007
Proc. SPIE. 6666, Optical Materials and Structures Technologies III
KEYWORDS: Mirrors, Polishing, Chemical species, Ceramics, Manufacturing, Aspheric lenses, Abrasives, Silicon carbide, Surface finishing, Plasma

PROCEEDINGS ARTICLE | October 17, 2003
Proc. SPIE. 4977, Photon Processing in Microelectronics and Photonics II
KEYWORDS: Metals, Dielectrics, Silicon, Laser applications, Semiconductor lasers, Microelectronics, Micromachining, Semiconducting wafers, Laser optics, Absorption

Conference Committee Involvement (1)
Laser Applications in Microelectronic and Optoelectronic Manufacturing IX
26 January 2004 | San Jose, Ca, United States
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