Pranay Nath
at Auburn Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Polymers, Ultraviolet radiation, Silicon, Raman spectroscopy, Photoresist materials, Photomasks, Photoresist developing, 3D microstructuring, Grayscale lithography

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