Dr. Prasad Dasari
Principal Scientist at
SPIE Involvement:
Author
Publications (23)

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Optical lithography, Diffractive optical elements, Etching, Transmission electron microscopy, Scatterometry, Critical dimension metrology, Reactive ion etching, Semiconducting wafers, Scatter measurement

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Wafer-level optics, Thin films, Ellipsometry, X-ray optics, Metrology, Diffractive optical elements, Optical properties, X-rays, Dielectrics, Optical testing, Process control, Deposition processes, Semiconducting wafers

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Etching, Copper, Resistance, 3D modeling, Scatterometry, Reactive ion etching, Semiconducting wafers, Chemical mechanical planarization, Back end of line

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Ellipsometry, Metrology, Scanners, 3D modeling, Scanning electron microscopy, Scatterometry, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Metrology, Scatterometry, 3D metrology, Spectroscopic ellipsometry, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Neodymium, Semiconducting wafers

PROCEEDINGS ARTICLE | April 5, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: 3D acquisition, Spectroscopy, 3D modeling, Time metrology, 3D metrology, Finite element methods, Reflectance spectroscopy, Semiconducting wafers, Overlay metrology, Diffraction gratings

Showing 5 of 23 publications
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