Dr. Praveen Elakkumanan
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 March 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Lithography, Annealing, Ions, Manufacturing, Photomasks, Transistors, Optical proximity correction, Semiconducting wafers, Optics manufacturing, Telescopic pixel displays

Proceedings Article | 19 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Statistical analysis, Etching, Manufacturing, Resistance, Photomasks, Transistors, Performance modeling, Device simulation, Instrument modeling

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Detection and tracking algorithms, Printing, Photomasks, Transistors, Immersion lithography, Optical proximity correction, Algorithm development, Photoresist processing, 193nm lithography

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