Dr. Praveen Raghavan
at IMEC
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Optical lithography, Metals, Copper, Cobalt, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Standards development, Back end of line

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Logic, Optical lithography, Metals, Dielectrics, Silicon, Photomasks, Extreme ultraviolet, Transistors, Standards development

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Logic, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, Extreme ultraviolet lithography, New and emerging technologies, Back end of line

SPIE Journal Paper | 18 January 2018
JM3 Vol. 17 Issue 01
KEYWORDS: Metals, Standards development, Electronic design automation, Optical lithography, Back end of line, Switching, CMOS technology, Lithography, Front end of line, Integrated circuit design

Proceedings Article | 3 May 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Metals, Manufacturing, Double patterning technology, Semiconducting wafers, Standards development, Current controlled current source, Design for manufacturability

Showing 5 of 17 publications
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