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Dr. Prem Pal
at Nagoya Univ
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Author
Publications (1)
Proceedings Article | 26 February 2008 Paper
Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching
Prem Pal, Kazuo Sato, Miguel Gosalvez, Mitsuhiro Shikida
Proceedings Volume 6882, 68820F (2008) https://doi.org/10.1117/12.765475
KEYWORDS: Etching, Silicon, Semiconducting wafers, Anisotropic etching, Microelectromechanical systems, Microfluidics, Crystals, Oxides, Hydrogen, Wet etching
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